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  4. Self-Actuated Polymer-Based Cantilevers With Sharp Silicon Tips For High-Speed Atomic Force Microscopy
 
conference paper

Self-Actuated Polymer-Based Cantilevers With Sharp Silicon Tips For High-Speed Atomic Force Microscopy

Neuenschwander, Matthias  
•
Andany, Santiago H.  
•
Kanguel, Mustafa
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January 1, 2021
2021 21St International Conference On Solid-State Sensors, Actuators And Microsystems (Transducers)
21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

High-speed atomic force microscopy has thus far largely been limited to the use of small cantilevers in liquid, but the technique would greatly profit areas of nanotechnology that require the use of larger probes in air. We present polymer-based cantilevers with a low Q factor, an integrated electrothermal actuator and a sharp silicon tip. The devices can be used directly on commercial AFM setups utilizing a custom cantilever holder. They are suitable for high-speed tapping mode thanks to the high intrinsic damping of their polymer core. The integrated actuator allows for large amplitudes for off-resonance imaging, as well as for clean actuation tunes for tapping-mode imaging.

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Self Actuated Polymer-Based Cantilevers With Sharp Silicon Tips For High-Speed Atomic Force Microscopy.pdf

Type

Postprint

Version

http://purl.org/coar/version/c_ab4af688f83e57aa

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openaccess

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copyright

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628.82 KB

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Adobe PDF

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c49349484bf5a6c3cc02015b8e7c2ff6

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