conference presentation
Surface microfabricated SU-8 devices with integrated electrodes for scanning probe microscopy
2005
We report here on a new method to release functional SU-8 micro-components with embedded and integrated metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.
Type
conference presentation
Author(s)
Date Issued
2005
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Barcelona, Spain | 11-14 Sept, 2005 | |
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