Invited - High-resolution, Data-driven 3D X-ray Imaging of Microchips using Ptychography
As transistor dimensions have shrunk over the years, X-ray microscopy resolution has also improved to meet the demands of the semiconductor industry. Although electron microscopy can achieve higher resolution, X-rays offer unique advantages, including non-destructive 3D imaging of fully intact integrated circuit dies and the future possibility of imaging under operando conditions. In this work, we demonstrate the capabilities of ptychographic X-ray computed tomography for 3D microchip imaging at 4 nm resolution. To achieve such performance, we introduce newly developed methods to overcome nm-scale experimental instabilities and depth-of-field limitations. Microchip-specific high-throughput data collection methods will also be introduced.
2-s2.0-105019048065
Paul Scherrer Institut
Paul Scherrer Institut
Paul Scherrer Institut
Paul Scherrer Institut
Paul Scherrer Institut
USC Viterbi School of Engineering
École Polytechnique Fédérale de Lausanne
École Polytechnique Fédérale de Lausanne
Paul Scherrer Institut
2025-09-22
EPJ Web of Conferences; 335
2100-014X
2101-6275
01001
REVIEWED
EPFL
| Event name | Event acronym | Event place | Event date | 
EOSAM 2025  | Delft, Netherlands  | 2025-08-24 - 2025-08-28  | |