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  4. Invited - High-resolution, Data-driven 3D X-ray Imaging of Microchips using Ptychography
 
conference paper

Invited - High-resolution, Data-driven 3D X-ray Imaging of Microchips using Ptychography

Aidukas, Tomas
•
Phillips, Nicholas W.
•
Diaz, Ana
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El Gawhary, Omar
•
Witte, Stefan
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September 22, 2025
EOS Annual Meeting (EOSAM 2025)
European Optical Society EOS Annual Meeting 2025

As transistor dimensions have shrunk over the years, X-ray microscopy resolution has also improved to meet the demands of the semiconductor industry. Although electron microscopy can achieve higher resolution, X-rays offer unique advantages, including non-destructive 3D imaging of fully intact integrated circuit dies and the future possibility of imaging under operando conditions. In this work, we demonstrate the capabilities of ptychographic X-ray computed tomography for 3D microchip imaging at 4 nm resolution. To achieve such performance, we introduce newly developed methods to overcome nm-scale experimental instabilities and depth-of-field limitations. Microchip-specific high-throughput data collection methods will also be introduced.

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Type
conference paper
DOI
10.1051/epjconf/202533501001
Scopus ID

2-s2.0-105019048065

Author(s)
Aidukas, Tomas

Paul Scherrer Institut

Phillips, Nicholas W.

Paul Scherrer Institut

Diaz, Ana

Paul Scherrer Institut

Poghosyan, Emiliya

Paul Scherrer Institut

Müller, Elisabeth

Paul Scherrer Institut

Levi, A. F.J.

USC Viterbi School of Engineering

Aeppli, Gabriel  

École Polytechnique Fédérale de Lausanne

Guizar-Sicairos, Manuel  

École Polytechnique Fédérale de Lausanne

Holler, Mirko

Paul Scherrer Institut

Editors
El Gawhary, Omar
•
Witte, Stefan
•
Moreno, Ignacio
Date Issued

2025-09-22

Publisher

EDP Sciences

Published in
EOS Annual Meeting (EOSAM 2025)
Series title/Series vol.

EPJ Web of Conferences; 335

ISSN (of the series)

2100-014X

2101-6275

Article Number

01001

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LTM  
CXI  
Event nameEvent acronymEvent placeEvent date
European Optical Society EOS Annual Meeting 2025

EOSAM 2025

Delft, Netherlands

2025-08-24 - 2025-08-28

Available on Infoscience
October 27, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/255270
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