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  4. Invited - High-resolution, Data-driven 3D X-ray Imaging of Microchips using Ptychography
 
conference paper

Invited - High-resolution, Data-driven 3D X-ray Imaging of Microchips using Ptychography

Aidukas, Tomas
•
Phillips, Nicholas W.
•
Diaz, Ana
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El Gawhary, Omar
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Witte, Stefan
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September 22, 2025
EOS Annual Meeting (EOSAM 2025)
European Optical Society EOS Annual Meeting 2025

As transistor dimensions have shrunk over the years, X-ray microscopy resolution has also improved to meet the demands of the semiconductor industry. Although electron microscopy can achieve higher resolution, X-rays offer unique advantages, including non-destructive 3D imaging of fully intact integrated circuit dies and the future possibility of imaging under operando conditions. In this work, we demonstrate the capabilities of ptychographic X-ray computed tomography for 3D microchip imaging at 4 nm resolution. To achieve such performance, we introduce newly developed methods to overcome nm-scale experimental instabilities and depth-of-field limitations. Microchip-specific high-throughput data collection methods will also be introduced.

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epjconf_eosam2025_01001.pdf

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Main Document

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Published version

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openaccess

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CC BY

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1.16 MB

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8b0b87fe4cbf328d0430f6d6395432c5

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