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  4. SPAD Developed in 55 nm Bipolar-CMOS-DMOS Technology Achieving Near 90% Peak PDP
 
research article

SPAD Developed in 55 nm Bipolar-CMOS-DMOS Technology Achieving Near 90% Peak PDP

Ha, Won-Yong
•
Park, Eunsung
•
Eom, Doyoon
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January 1, 2024
Ieee Journal Of Selected Topics In Quantum Electronics

We present a single-photon avalanche diode (SPAD) developed in 55 nm bipolar-CMOS-DMOS (BCD) technology, which achieves high photon detection probability (PDP) while its breakdown voltage is lower than 20 V. To enhance the PDP performance, the SPAD junction is optimized with lightly-doped-drain and high-voltage-well layers which are provided in the BCD process. In addition, the dielectric layers over the SPAD are properly etched to reduce multilayer reflections so that the photon collection efficiency can be maximized. The SPAD achieves a peak PDP of 89.4% at 450 nm wavelength with the excess bias voltage of 7 V, while its breakdown voltage is 16.1 V. At the same bias condition, the device shows a dark count rate (DCR) of 38.2 cps/mu m(2). It also achieves a timing jitter of 55 ps at 940 nm with the 7 V excess bias. This new high-performance SPAD implemented in such an advanced node BCD technology operating at a low breakdown voltage is expected to have a major impact on several single-photon applications, especially biomedical sensing and imaging.

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Type
research article
DOI
10.1109/JSTQE.2023.3303678
Web of Science ID

WOS:001179580200013

Author(s)
Ha, Won-Yong
Park, Eunsung
Eom, Doyoon
Park, Hyo-Sung
Gramuglia, Francesco  
Keshavarzian, Pouyan  
Kizilkan, Ekin  
Bruschini, Claudio  
Chong, Daniel
Tan, Shyue Seng
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Date Issued

2024-01-01

Publisher

Ieee-Inst Electrical Electronics Engineers Inc

Published in
Ieee Journal Of Selected Topics In Quantum Electronics
Volume

30

Issue

1

Article Number

3800410

Subjects

Technology

•

Physical Sciences

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Single-Photon Avalanche Diodes

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Photonics

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Junctions

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Electric Breakdown

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Timing Jitter

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Temperature Measurement

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Semiconductor Device Measurement

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Avalanche Photodiode (Apd)

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Bipolar-Cmos-Dmos (Bcd) Technology

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Detector

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Electronic Photonic Integration

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Fluorescence Correlation Spectroscopy (Fcs)

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Fluorescence Lifetime Imaging Microscopy (Flim)

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Frontside Illumination (Fsi)

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Geiger-Mode Avalanche Photodiode (G-Apd)

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High-Volume Manufacturing

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Integrated Optics Device

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Integration Of Photonics In Standard Cmos Technology

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Optical Sensing

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Optical Sensor

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Photodetector

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Photodiode

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Photomultiplier

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Photon Counting

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Photon Timing

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Semiconductor

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Sensor

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Silicon

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Single-Photon Avalanche Diode (Spad)

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Single-Photon Counting

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Single-Photon Imaging

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Standard Cmos Technology

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
AQUA  
FunderGrant Number

Korea Institute of Science and Technology

Available on Infoscience
April 17, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/207179
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