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  4. Miniaturized, focusing fan-out elements: design, fabrication and characterization
 
research article

Miniaturized, focusing fan-out elements: design, fabrication and characterization

Schilling, A.
•
Nussbaum, Ph.
•
Ossmann, Ch.
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1999
Pure and Applied Optics

We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the microlenses were measured with a Twyman-Green interferometer. The overall performance of the combined, hybrid elements is demonstrated with intensity distributions recorded in the focal planes.

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