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research article

Numerical simulations of planar electrostatic wobble motors

Lerch, P.
•
Romanowicz, Bartlomiej
•
Paratte, L.
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1995
Sensors and Actuators A: Physical

We present a numerical study of the electrostatic wobble motor. Both finite- element calculations and analytical approaches are used to calculate the torque exerted by the electrodes. Both methods give very similar results, validating an analytical approach. We also study the dynamic behaviour of this type of motor. We show how to optimize the torque by optimally adapting mechanical and electrical parameters.

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