research article
SU-8 nanocomposite photoresist with low stress properties for microfabrication applications
Type
research article
Web of Science ID
WOS:000238919300011
Author(s)
Date Issued
2006
Published in
Volume
83
Start page
1966
End page
1970
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Use this identifier to reference this record