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conference paper

In-liquid MEMS assembly by optical trapping

Gullo, M. R.
•
Jacot-Descombes, L.
•
Brugger, J.  
2013
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

This paper presents a novel in-liquid method to manipulate and micro-assemble MEMS in 3D by means of holographic optical trapping and hydrophobic interaction. Up to eight traps can be simultaneously generated with a trapping stiffness of 5 pN/mu m each. SU8 cylinders (10 mu m diameter, 10 mu m- 40 mu m height) were used as test MEMS, which could be translated with a speed of 6 mu m/s and rotated at 30 rpm. All forces were calibrated by video tracking the Brownian motion of the trapped MEMS and applying Boltzmann statistics. Selected surfaces of the MEMS parts were rendered hydrophobic and used as assembly sites. Using this approach it was possible to permanently assemble SU8 cylinders.

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Type
conference paper
DOI
10.1109/MEMSYS.2013.6474181
Web of Science ID

WOS:000320549200021

Author(s)
Gullo, M. R.
Jacot-Descombes, L.
Brugger, J.  
Date Issued

2013

Publisher

IEEE

Publisher place

New York

Published in
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
ISBN of the book

978-1-4673-5654-1

Total of pages

4

Series title/Series vol.

Proceedings IEEE Micro Electro Mechanical Systems

Start page

78

End page

81

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent placeEvent date
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

Taipei, Taiwan

20-24 01 2013

Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/94858
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