Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. In-liquid MEMS assembly by optical trapping
 
conference paper

In-liquid MEMS assembly by optical trapping

Gullo, M. R.
•
Jacot-Descombes, L.
•
Brugger, J.  
2013
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

This paper presents a novel in-liquid method to manipulate and micro-assemble MEMS in 3D by means of holographic optical trapping and hydrophobic interaction. Up to eight traps can be simultaneously generated with a trapping stiffness of 5 pN/mu m each. SU8 cylinders (10 mu m diameter, 10 mu m- 40 mu m height) were used as test MEMS, which could be translated with a speed of 6 mu m/s and rotated at 30 rpm. All forces were calibrated by video tracking the Brownian motion of the trapped MEMS and applying Boltzmann statistics. Selected surfaces of the MEMS parts were rendered hydrophobic and used as assembly sites. Using this approach it was possible to permanently assemble SU8 cylinders.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

Gullo M 2013 - IEEE MEMS - In-liquid mems assembly by optical trapping.pdf

Access type

restricted

Size

682.3 KB

Format

Adobe PDF

Checksum (MD5)

9a28911ad0929dc0e987c76a89699d7c

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés