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  4. Pentacene - SiO2 interface: Role of the environment prior to pentacene deposition and its impact on TFT DC characteristics
 
conference paper

Pentacene - SiO2 interface: Role of the environment prior to pentacene deposition and its impact on TFT DC characteristics

Cvetkovic, N. V.  
•
Tsamados, D.
•
Sidler, K.  
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2008
2008 26th International Conference on Microelectronics
26th International Conference on Microelectronics (MIEL 2008)

In this paper we report on the effect of the environment on the SiO₂/pentacene interface. Two batches of bottom-contact pentacene thin-film transistors have been fabricated with a 100 nm thick SiO₂ as dielectric. Considerable shifts of the threshold voltages have been observed for the TFTs whose dielectric surface has been exposed to air for long periods of storage before depositing the pentacene layer. Based on reports from other research groups in the field, we consider that long exposure of the SiO₂ to air may have the same effect on the SiO₂-pentace interface as short but more aggressive oxygen plasma treatment.

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Type
conference paper
DOI
10.1109/ICMEL.2008.4559282
Web of Science ID

WOS:000257432600062

Author(s)
Cvetkovic, N. V.  
Tsamados, D.
Sidler, K.  
Brugger, J.  
Ionescu, A. M.  
Date Issued

2008

Publisher

IEEE

Published in
2008 26th International Conference on Microelectronics
Subjects

interface structure

•

organic compounds

•

silicon compounds

•

thin film transistors

•

Jk-SiO2

•

bottom-contact pentacene thin-film transistors

•

dielectric surface

•

oxygen plasma treatment

•

size 100 nm

•

threshold voltages

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
LMIS1  
Event nameEvent placeEvent date
26th International Conference on Microelectronics (MIEL 2008)

Nis, Serbia

May 11-14, 2008

Available on Infoscience
July 15, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41324
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