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research article

Suspended SU-8 structures for monolithic microfluidic channels

Moser, Yves
•
Forti, Riccardo
•
Jiguet, Sébastien
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2011
Microfluidics and Nanofluidics

SU-8 photoresist is commonly used in the field of microfabrication as structural material or for molding of microfluidic devices. One major limitation, however, is the difficulty to process partially freestanding SU-8 structures or monolithic closed cavities and channels on-chip. We propose here a simple method for the fabrication of suspended structures, in particular of monolithic SU-8 microchannels. The method is based on the processing of a SU-8 doublelayer. Appropriate modification of the optical properties of the upper layer allows for selective crosslinking in the layer sandwich. This process is suitable for versatile layouts comprising open and hollow SU-8 structures on the same chip.

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Type
research article
DOI
10.1007/s10404-010-0657-5
Web of Science ID

WOS:000286199700019

Author(s)
Moser, Yves
Forti, Riccardo
Jiguet, Sébastien
Lehnert, Thomas  
Gijs, M. A. M.  
Date Issued

2011

Publisher

Springer-Verlag

Published in
Microfluidics and Nanofluidics
Volume

10

Issue

1

Start page

219

End page

224

Subjects

SU-8

•

Monolithic microchannel

•

Double-layer

Note

National Licences

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS2  
Available on Infoscience
September 8, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/53443
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