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  4. Metal-Ferroelectric-Metal-Oxide-Semiconductor Field Effect Transistor with Sub-60mV/decade Subthreshold Swing and Internal Voltage Amplification
 
conference paper

Metal-Ferroelectric-Metal-Oxide-Semiconductor Field Effect Transistor with Sub-60mV/decade Subthreshold Swing and Internal Voltage Amplification

Rusu, Alexandru  
•
Salvatore, Giovanni A.  
•
Jimenez, David
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2010
2010 International Electron Devices Meeting - Technical Digest
International Electron Devices Meeting (IEDM)

This work reports the first complete experimental demonstration and investigation of subthreshold swing, SS, smaller than 60 mV/decade, at room temperature, due to internal voltage amplification in FETs with a Metal-Ferroelectric-Metal-Oxide gate stack. The investigated p-type MOS transistor is a dedicated test structure to explore the negative capacitance effect by probing the internal voltage between the P(VDF-TrFE) and SiO2 dielectric layers of the gate stack. We find that the region of internal surface potential amplification, d psi(s)/dV(g)> 1, corresponds to an S-shape of the polarization versus ferroelectric voltage (associated with negative capacitance). In Fe-FETs the internal voltage amplification could significantly lower their SS, even without reaching sub-60mV/dec values. SSmin as low as 46 to 58 mV/decade and average swings, SSavg, as small as 51 to 59 mV/dec are observed for the first time in a aminor loop hysteretic characteristics of Fe-FETs.

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Type
conference paper
DOI
10.1109/IEDM.2010.5703374
Web of Science ID

WOS:000287997300098

Author(s)
Rusu, Alexandru  
Salvatore, Giovanni A.  
Jimenez, David
Ionescu, Adrian M.  
Date Issued

2010

Publisher

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa

Published in
2010 International Electron Devices Meeting - Technical Digest
ISBN of the book

978-1-4244-7419-6

Series title/Series vol.

International Electron Devices Meeting

Start page

16.3.1

End page

16.3.4

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Event nameEvent placeEvent date
International Electron Devices Meeting (IEDM)

San Francisco, CA

Dec 06-08, 2010

Available on Infoscience
December 16, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/74730
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