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  4. Off-Axis Low Coherence Interferometry for Surface Topology Measurement
 
conference paper

Off-Axis Low Coherence Interferometry for Surface Topology Measurement

Delacrétaz, Yves
•
Boss, Daniel
•
Lang, Florian
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2010
Speckle 2010: Optical Metrology
Speckle 2010

In this communication we introduce a low or reduced coherence interferometry technique that can be used to retrieve surface topology on samples with high roughness. Moreover, we will show that the approach enables surface topology measurement also at the interface of so-called turbid media, where multiple scattering inside tissues can be a major issue, preventing accurate measurements.

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