conference poster not in proceedings
Parylene-Based Hollow Nanomechanical Resonators For Bioapplications
2016
We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in micro- and nano-fabrication. In particular, the example we present here shows a hybrid structure with silicon nitride and parylene, but we have also demonstrated compatibility with metallic electrodes and aluminum nitride piezoelectric layers.
Type
conference poster not in proceedings
Date Issued
2016
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Vienna, Austria | September 19-23, 2016 | |
Available on Infoscience
September 15, 2016
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