Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Data coding tools for color-coded vector nanolithography
 
research article

Data coding tools for color-coded vector nanolithography

Lekki, Janusz
•
Kumar, Saveen
•
Parihar, Sunil S.
Show more
2004
Review of Scientific Instruments

We propose and demonstrate the ability and efficiency of using a universal file format for a nanolithography pattern. A problem faced by the physicists working in the field of nanolithography is a lack of a flexible pattern design software (possibly open–source) that could be applied in combination with a broad range of commercial scanning probe microscope (SPM) systems. The current nanolithography software packages are device–specific and not portable. Therefore, it is impossible to make a lithography pattern and share it with fellow physicists working on a networked sub-system. In this paper we describe the software designed to read and interpret a nanolithography pattern stored in a Windows Metafile (WMF) standard graphic format and next to draw it on a substrate using an SPM tip. The nanolithography parameters like height, velocity, feedback force, etc. are coded in the color of the WMF onto the RGB channels of the image establishing a distinct relation between a graphical feature (color) and the used nanolithography scheme (voltage, height, etc.). The concept enables preparation of complex patterns using any standard graphic software and aids an intuitive recognition of the mode and parameters set for a pattern. The advantages of using a WMF over other approaches and the universal scope of the software are discussed.

  • Files
  • Details
  • Metrics
Type
research article
DOI
10.1063/1.1805014
Web of Science ID

WOS:000224962900045

Author(s)
Lekki, Janusz
Kumar, Saveen
Parihar, Sunil S.
Grange, Sebastien  
Baur, Charles  
Foschia, Raphael
Kulik, Andrzej  
Date Issued

2004

Published in
Review of Scientific Instruments
Volume

75

Issue

11

Start page

4646

End page

4650

Subjects

[VRAI]

•

nanolithography

•

nanomanipulation

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LSRO  
LNNME  
Available on Infoscience
July 12, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/232590
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés