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research article

Polyimide/SU-8 catheter-tip MEMS gauge pressure sensor

Hasenkamp, Willyan
•
Forchelet, David  
•
Pataky, Kristopher
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2012
Biomedical Microdevices

This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.

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Type
research article
DOI
10.1007/s10544-012-9661-8
Web of Science ID

WOS:000308963200003

Author(s)
Hasenkamp, Willyan
Forchelet, David  
Pataky, Kristopher
Villard, Jimmy
Van Lintel, Harald  
Bertsch, Arnaud  
Wang, Qing
Renaud, Philippe  
Date Issued

2012

Publisher

Springer

Published in
Biomedical Microdevices
Volume

14

Issue

5

Start page

819

End page

828

Subjects

Pressure sensor

•

Pressure monitoring

•

Biosensor

•

Strain sensor

•

Catheter-tip

•

Polyimide

•

SU-8

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/86150
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