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  4. Quantitative (200) dark-field imaging of InGaAs/GaAs layers : measurement of chemical composition and strain effects
 
research article

Quantitative (200) dark-field imaging of InGaAs/GaAs layers : measurement of chemical composition and strain effects

Cagnon, J
•
Buffat, PA  
•
Stadelmann, PA  
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2001
Inst. Phys. Conf. Ser.
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