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research article

Overview on low temperature co-fired ceramic sensors

Jurków, Dominik
•
Maeder, Thomas  
•
Dąbrowski, Arkadiusz
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2015
Sensors and Actuators A: Physical

Low Temperature Co-fired Ceramics (LTCC) is one of the microelectronic techniques. This technology was initially developed as an alternative to Printed Circuit Boards (PCB) and classical thick-film technology, and it has found application in the fabrication of multilayer ceramic boards for electronic devices. Fast and wide development of this technology permitted the fabrication of 3D mechanical structures and integration with various different processes. Thanks to this, LTCC has found application in the manufacturing of various microelectronic devices. This paper presents an overview on LTCC technology and gives a detailed summary on physical quantity sensors fabricated using LTCC technique.

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Type
research article
DOI
10.1016/j.sna.2015.05.023
Web of Science ID

WOS:000362856200016

Author(s)
Jurków, Dominik
Maeder, Thomas  
Dąbrowski, Arkadiusz
Santo Zarnik, Marina
Belavič, Darko
Bartsch de Torres, Heike
Müller, Jens
Date Issued

2015

Publisher

Elsevier

Published in
Sensors and Actuators A: Physical
Volume

233

Start page

125

End page

146

Subjects

Technologie couches épaisses

•

Couches épaisses

•

Thick-film technology

•

LTCC

•

Céramique co-cuite basse température

•

Low-temperature coffered ceramic

•

Capteurs

•

Sensors

•

Structuration

•

Céramiques

•

Ceramics

•

Matériaux

•

Materials

Note

Review, collaboration Poly Wrocław - EPFL - TU-Ilmenau - Jožef-Stefan Institute

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPM  
Available on Infoscience
June 1, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/114862
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