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research article

Ultrafast laser interaction with transparent multi-layer SiO2/Si3N4 films

Ricca, Ruben  
•
Boureau, Victor  
•
Bellouard, Yves  
December 29, 2021
Journal of Applied Physics

We investigate the use of ultrafast lasers exposure to induce localized crystallization and elemental redistribution in amorphous dielectric multi-layers, composed of alternating Si3N4 and SiO2 layers of sub-micrometer thickness. Specifically, we report on the occurrence of a laser-induced elemental intermixing process and the presence of silicon nanocrystals clusters localized within the multi-layers structure. The spatial distribution of these clusters goes significantly beyond the zone under direct laser exposure providing evidence of energy being channeled transversely to the laser propagation axis at the interface of the nanoscale layers. Thanks to the extreme conditions reigning during laser exposure, this process transposed to various materials may offer a pathway for local and selective crystallization of a variety of compounds and phases, difficult to obtain otherwise.

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Type
research article
DOI
10.1063/5.0065726
ArXiv ID

2112.00997

Author(s)
Ricca, Ruben  
Boureau, Victor  
Bellouard, Yves  
Date Issued

2021-12-29

Published in
Journal of Applied Physics
Volume

130

Issue

24

Article Number

243105

Subjects

Ultrafast laser

•

Thin films

•

SiO2

•

SiNx

•

Laser-matter

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GALATEA  
Available on Infoscience
January 1, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/184268
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