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  4. Development of a Hybrid MEMS BLDC Micromotor
 
conference paper

Development of a Hybrid MEMS BLDC Micromotor

Merzaghi, S.  
•
Koechli, C.  
•
Perriard, Y.  
2009
Proceedings of the IEEE Energy Conversion Congress and Exposition (ECCE)
IEEE Energy Conversion Congress and Exposition (ECCE)

This paper addresses the design of a new hybrid MEMS micromotor. It is a small 3-phases axial flux BLDC motor. The stator is realized following the almost CMOS technology rules used for MEMS manufacture and the coils have two copper layers. The rotor is made of a standard ring permanent magnet assembled over the stator chip. The stator design has been performed using an analytical model also presented in the paper. The microfabrication of the first prototypes is discussed before their characterization. With a Joule efficiency of about 31% for an input power lower then 400 nW, this MEMS micromotor has very good performances and demonstrates the potential of electromagnetic systems at this scale.

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Type
conference paper
DOI
10.1109/ECCE.2009.5316400
Web of Science ID

WOS:000279630101210

Author(s)
Merzaghi, S.  
Koechli, C.  
Perriard, Y.  
Date Issued

2009

Published in
Proceedings of the IEEE Energy Conversion Congress and Exposition (ECCE)
Start page

3595

End page

3601

Subjects

Brushless DC motors

•

Microfabrication

•

Micromotors

•

Permanent magnet motors

•

Rotor

•

Stators

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LAI  
Event nameEvent placeEvent date
IEEE Energy Conversion Congress and Exposition (ECCE)

San Jose, USA

September 20-24, 2009

Available on Infoscience
September 30, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/42998
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