research article
Multigate Buckled Self-Aligned Dual Si Nanowire MOSFETs on Bulk Si for High Electron Mobility
In this paper, we report for the first time making multi-gate buckled self-aligned dual Si nanowires including two sub-100 nm cross-section cores on bulk Si substrate using optical lithography, hard mask/spacer technology and local oxidation. 0.8 GPa uniaxial tensile stress was measured on the buckled dual nanowires using micro-Raman spectroscopy. The buckled multi-gate dual Si nanowires show excellent electrical characteristics e.g. 62 mV/dec. and 42% low-field electron mobility enhancement due to uniaxial tensile stress in comparison to the non-strained device, all at VDS=50 mV and 293 K.
Type
research article
Web of Science ID
WOS:000308464100008
Author(s)
Date Issued
2012
Published in
Volume
11
Start page
902
End page
906
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
June 19, 2012
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