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research article

Hyperelastic pressure sensing with a liquid-embedded elastomer

Park, Yong-Lae
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Majidi, Carmel
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Kramer, Rebecca
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2010
Journal Of Micromechanics And Microengineering

A hyperelastic pressure transducer is fabricated by embedding silicone rubber with microchannels of conductive liquid eutectic gallium-indium. Pressing the surface of the elastomer with pressures in the range of 0-100 kPa will deform the cross-section of underlying channels and change their electric resistance by as much as 50%. Microchannels with dimensions as small as 25 mu m are obtained with a maskless, soft lithography process that utilizes direct laser exposure. Change in electrical resistance is measured as a function of the magnitude and area of the surface pressure as well as the cross-sectional geometry, depth and relative lateral position of the embedded channel. These experimentally measured values closely match closed-form theoretical predictions derived from plane strain elasticity and contact mechanics.

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