Skip to main content
Infoscience
English
French
Log In
Log in with EPFL account
Log in with local account
Infoscience
English
French
Log In
Log in with EPFL account
Log in with local account
Home
Academic and Research Output
Journal articles
Applications of Micromachined Sensors Integrated Micro-Motion Systems : Micromachining
research article
Applications of Micromachined Sensors Integrated Micro-Motion Systems : Micromachining
de Rooij, N. F.
1990
Control and Applications
Details
Metrics