research article
Piezoelectric cantilever beams actuated by PZT sol-gel thin film
The mechanical response of piezoelectric cantilever beams actuated by sol-gel- derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflection of the beams with a standard interferometry method. Interferometric displacement measurements, electrical measurements and finite- element simulations are reported to determine the piezoelectric coefficient d(31) of the PZT thin film.
Type
research article
Author(s)
Luginbuhl, P.
Racine, G. A.
Lerch, P.
Romanowicz, Bartlomiej
Brooks, K. G.
Setter, N.
Date Issued
1996
Published in
Volume
54
Issue
1-3
Start page
530
End page
535
Note
154
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
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