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research article

Piezoelectric cantilever beams actuated by PZT sol-gel thin film

Luginbuhl, P.
•
Racine, G. A.
•
Lerch, P.
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1996
SENSORS AND ACTUATORS A-PHYSICAL

The mechanical response of piezoelectric cantilever beams actuated by sol-gel- derived lead zirconium titanate (PZT) thin film is reported. Small multilayered beams are used to analyse the converse piezoelectric effect and to measure the mechanical deflection of the beams with a standard interferometry method. Interferometric displacement measurements, electrical measurements and finite- element simulations are reported to determine the piezoelectric coefficient d(31) of the PZT thin film.

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Type
research article
DOI
10.1016/S0924-4247(95)01196-X
Author(s)
Luginbuhl, P.
Racine, G. A.
Lerch, P.
Romanowicz, Bartlomiej
Brooks, K. G.
de Rooij, N. F.  
Renaud, Philippe  
Setter, N.
Date Issued

1996

Published in
SENSORS AND ACTUATORS A-PHYSICAL
Volume

54

Issue

1-3

Start page

530

End page

535

Note

154

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
SAMLAB  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/216097
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