research article
LTCC-Based Sensors for Mechanical Quantities
Besides their excellent dielectric and thermo-mechanical characteristics Low Temperature Cofiring Ceramics (LTCC) are also well suited for the fabrication of 3D micromechanical components such as sensors for mechanical quantities. This paper describes the development of such sensors covering some material and technological aspects. Furthermore, the design process for mechanical sensors is discussed as well as application examples of sensors for the detection of pressure, force, acceleration and flow.
Type
research article
Web of Science ID
WOS:000315953900007
Author(s)
Date Issued
2012
Volume
42
Issue
4
Start page
260
End page
271
Subjects
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Use this identifier to reference this record