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research article

LTCC-Based Sensors for Mechanical Quantities

Partsch, Uwe
•
Lenz, Christian
•
Ziesche, Steffen
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2012
Informacije Midem-Journal of Microelectronics, Electronic Components and Materials

Besides their excellent dielectric and thermo-mechanical characteristics Low Temperature Cofiring Ceramics (LTCC) are also well suited for the fabrication of 3D micromechanical components such as sensors for mechanical quantities. This paper describes the development of such sensors covering some material and technological aspects. Furthermore, the design process for mechanical sensors is discussed as well as application examples of sensors for the detection of pressure, force, acceleration and flow.

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Type
research article
Web of Science ID

WOS:000315953900007

Author(s)
Partsch, Uwe
Lenz, Christian
Ziesche, Steffen
Lohrberg, Carolin
Neubert, Holger
Maeder, Thomas  
Date Issued

2012

Publisher

Soc Microelectronics, Electron Components Materials-Midem

Published in
Informacije Midem-Journal of Microelectronics, Electronic Components and Materials
Volume

42

Issue

4

Start page

260

End page

271

Subjects

LTCC

•

Sensors

•

3D-Integration

URL

URL

http://www.midem-drustvo.si/journal.htm
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPM  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/91483
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