conference paper
MEMS Capacitive Pressure Sensor Based on Polysilicon Sealed Membrane
2006
XX Eurosensors
This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon sealed membrane sensitive to pressure. When operated as a pressure sensor two operation regions are observed, an exponentially sensitivity region at low pressure (0-100mmHg) and a linear sensitivity region (20-400kPa) in the touch operation mode. Preliminary results show a sensitivity of 2.2fF/mmHg and are in good agreement with analytical and finite-element simulations.
Type
conference paper
Author(s)
Date Issued
2006
Published in
XX Eurosensors
Volume
2
Start page
456
End page
457
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Gothenburg, Sweden | September 17-20, 2006 | |
Use this identifier to reference this record