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research article

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

Boero, G  
•
Utke, I
•
Bret, T  
Show more
2005
Applied Physics Letters

Hall devices having an active area of about (500 nm)(2) are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current sensitivity of about 1 V/AT, a resistance of a few kilo-ohms, and can be biased with a maximum current of about 1 mA. The room-temperature magnetic field resolution is about 10 muT/Hz(1/2) at frequencies above 1 kHz.

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Type
research article
DOI
10.1063/1.1856134
Web of Science ID

WOS:000226761400048

Author(s)
Boero, G  
Utke, I
Bret, T  
Quack, Niels  
Todorova, M
Mouaziz, S  
Kejik, P  
Brugger, J  
Popovic, RS  
Hoffmann, P  
Date Issued

2005

Publisher

American Institute of Physics

Published in
Applied Physics Letters
Volume

86

Issue

4

Article Number

042503 (3 pages)

Subjects

probe microscopy

•

room-temperature

•

thin-films

•

sensors

•

tips

•

nano

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GR-QUA  
LMIS1  
LMIS3  
Available on Infoscience
November 2, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/218574
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