research article
Submicrometer Hall devices fabricated by focused electron-beam-induced deposition
Hall devices having an active area of about (500 nm)(2) are fabricated by focused electron-beam-induced deposition. The deposited material consists of cobalt nanoparticles in a carbonaceous matrix. The realized devices have, at room temperature, a current sensitivity of about 1 V/AT, a resistance of a few kilo-ohms, and can be biased with a maximum current of about 1 mA. The room-temperature magnetic field resolution is about 10 muT/Hz(1/2) at frequencies above 1 kHz.
Type
research article
Web of Science ID
WOS:000226761400048
Author(s)
Utke, I
Todorova, M
Date Issued
2005
Publisher
Published in
Volume
86
Issue
4
Article Number
042503 (3 pages)
Subjects
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
Available on Infoscience
November 2, 2005
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