conference presentation
Flexible Membranes Improve Resolution in Stencil Lithography
2010
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication
Type
conference presentation
Date Issued
2010
Published in
The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication
URL
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
Anchorage, Alaska, U.S.A. | June 1- 4, 2010 | |
Use this identifier to reference this record