Flexible Membranes Improve Resolution in Stencil Lithography

conference presentation

Flexible Membranes Improve Resolution in Stencil Lithography

•

Vazquez-Mena, Oscar

•

Villanueva, Luis Guillermo

2010

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication

The 54th International Conference on Electron, Ion, and Photon Beam Technology, & Nanofabrication

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SidlerK_EPFL.pdf

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restricted

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171.75 KB

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