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  4. Silicon microcantilevers with piezoresistive and MOSFET detection
 
conference paper

Silicon microcantilevers with piezoresistive and MOSFET detection

Tosolini, G.
•
Villanueva, G.  
•
Bausells, J.
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2009
7th Spanish Conference on Electron Devices (CDE)
7th Spanish Conference on Electron Devices (CDE)
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