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research article

Novel methods to pattern polymers for microfluidics

Martin, C.
•
Llobera, A.
•
Leïchlé, T.
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2008
Microelectronic Engineering

We present two novel methods for the preparation of arbitrary microscale patterns of polymers on surfaces with pre-defined topography. While photosensitive polymers are used commonly together with optical lithography, the methods presented can be used for nonphotostructurable polymers and where spin-coating cannot be performed. As demonstrator of the viability of the proposed fabrication process, they have been applied for the definition of hydrophobic barriers on a microfluidics network, which is dedicated to selectively dispense liquid to a spotting device consisting of 12 silicon microcantilevers.

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Type
research article
DOI
10.1016/j.mee.2008.01.052
Web of Science ID

WOS:000257413400059

Author(s)
Martin, C.
Llobera, A.
Leïchlé, T.
Villanueva, G.  
Voigt, A.
Fakhfouri, V.  
Kim, J. Y.  
Berthet, N.
Bausells, J.
Gruetzner, G.
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Date Issued

2008

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

85

Start page

972

End page

975

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
NEMS  
LMIS1  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/26382
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