Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. 5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate
 
research article

5 GHz laterally-excited bulk-wave resonators (XBARs) based on thin platelets of lithium niobate

Plessky, V.
•
Yandrapalli, S.  
•
Turner, P. J.
Show more
January 24, 2019
Electronics Letters

In a free-standing 400-nm-thick platelet of crystalline ZY-LiNbO3, narrow electrodes (500 nm) placed periodically with a pitch of a few microns can eXcite standing shear-wave bulk acoustic resonances (XBARs), by utilising lateral electric fields oriented parallel to the crystalline Y-axis and parallel to the plane of the platelet. The resonance frequency of similar to 4800 MHz is determined mainly by the platelet thickness and only weakly depends on the electrode width and the pitch. Simulations show quality-factors (Q) at resonance and anti-resonance higher than 1000. Measurements of the first fabricated devices show a resonance Q-factor similar to 300, strong piezoelectric coupling similar to 25%, (indicated by the large Resonance-antiResonance frequency spacing, similar to 11%) and an impedance at resonance of a few ohms. The static capacitance of the devices, corresponds to the imaginary part of the impedance similar to 100 omega. This device opens the possibility for the development of low-loss, wide band, RF filters in the 3-6 GHz range for 4th and 5th generation (4G/5G) mobile phones. XBARs can be produced using standard optical photolithography and MEMS processes. The 3rd, 5th, 7th, and 9th harmonics were observed, up to 38 GHz, and are also promising for high frequency filter design.

  • Files
  • Details
  • Metrics
Type
research article
DOI
10.1049/el.2018.7297
Web of Science ID

WOS:000457283900020

Author(s)
Plessky, V.
Yandrapalli, S.  
Turner, P. J.
Villanueva, L. G.  
Koskela, J.
Hammond, R. B.
Date Issued

2019-01-24

Published in
Electronics Letters
Volume

55

Issue

2

Start page

98

End page

100

Subjects

Engineering, Electrical & Electronic

•

Engineering

•

photolithography

•

crystal resonators

•

acoustic resonators

•

lithium compounds

•

electrodes

•

bulk acoustic wave devices

•

q-factor

•

micromechanical devices

•

microwave resonators

•

microwave filters

•

lithium niobate

•

narrow electrodes

•

shear-wave bulk acoustic resonances

•

lateral electric fields

•

resonance frequency

•

quality-factors

•

xbar

•

laterally-excited bulk-wave resonators

•

free-standing platelet

•

crystalline y-axis

•

resonance q-factor

•

piezoelectric coupling

•

resonance-antiresonance frequency spacing

•

low-loss filters

•

wide band filters

•

rf filters

•

4th generation mobile phones

•

5th generation mobile phones

•

optical photolithography

•

mems process

•

high frequency filter

•

frequency 5

•

0 ghz

•

size 500

•

0 nm

•

frequency 3

•

0 ghz to 6

•

0 ghz

•

size 400 nm

•

linbo3

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
February 13, 2019
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/154462
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés