research article
Polar ceramics in rf-MEMS and microwave reconfigurable electronics: A brief review on recent issues
Properties and fabrication status of microdevices for microwaves based on polar ceramics are reviewed. We discuss bulk acoustic wave devices with AlN films, rf-MEMS capacitive switches with high permittivity materials, and tunable ferroelectrics. The relevant properties of ferroelectrics for microwave applications are summarized with emphasis on composites and thin films.
Type
research article
Web of Science ID
WOS:000226236100034
Author(s)
Date Issued
2004
Published in
Volume
13
Issue
1-3
Start page
215
End page
222
Subjects
Note
Setter, N Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Swiss Fed Inst Technol, Ceram Lab, CH-1015 Lausanne, Switzerland
886NR
Cited References Count:22
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
August 21, 2006
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