Skip to main content
Infoscience
English
French
Log In
Log in with EPFL account
Log in with local account
Infoscience
English
French
Log In
Log in with EPFL account
Log in with local account
Home
Academic and Research Output
Journal articles
Surface Micromachining
research article
Surface Micromachining
Linder, C.
•
Paratte, L.
•
Grétillat, M.-A.
Show more
1992
Journal of Micromechanics and Microengineering
Details
Metrics