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  4. Method and Apparatus for Coating Nanoparticulate Films on Complex Substrates
 
patent

Method and Apparatus for Coating Nanoparticulate Films on Complex Substrates

Kiwi, Juan
•
Rtimi, Sami  
•
Pulgarin, César
2016

Active films and processes for depositing the same onto a complex 3D shape substrates and implants are provided. The process comprises the following steps: inserting into a process chamber a sputtering target, including at least two chemical elements and a complex shape 3D substrate on a substrate holder, providing a gas to be ionized into the process chamber with a controlled pressure; applying a voltage in pulse between the sputtering target and the complex shape 3D substrate; and generating a magnetic field at the surface of the sputtering target inside the process chamber as required for HIPIMS.

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Type
patent
EPO Family ID

50002796

Author(s)
Kiwi, Juan
Rtimi, Sami  
Pulgarin, César
Note

Alternative title(s) : (en) Method and apparatus for coating nanoparticulate films on complex substrates

TTO classification

TTO:6.1319

EPFL units
AVP-R-TTO  
GPAO  
DOICountry codeKind codeDate issued

US2016376694

US

A1

2016-12-29

WO2015079286

WO

A1

2015-06-04

Available on Infoscience
May 11, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/137299
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