Method and Apparatus for Coating Nanoparticulate Films on Complex Substrates
Active films and processes for depositing the same onto a complex 3D shape substrates and implants are provided. The process comprises the following steps: inserting into a process chamber a sputtering target, including at least two chemical elements and a complex shape 3D substrate on a substrate holder, providing a gas to be ionized into the process chamber with a controlled pressure; applying a voltage in pulse between the sputtering target and the complex shape 3D substrate; and generating a magnetic field at the surface of the sputtering target inside the process chamber as required for HIPIMS.
50002796
Alternative title(s) : (en) Method and apparatus for coating nanoparticulate films on complex substrates
TTO:6.1319
DOI | Country code | Kind code | Date issued |
US2016376694 | US | A1 | 2016-12-29 |
WO2015079286 | WO | A1 | 2015-06-04 |