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  4. Interferometer coordinate measurement system for use in measurement and machining tools has partially reflecting boundary surfaces within its measurement head with a separation shorter than the coherence length
 
patent

Interferometer coordinate measurement system for use in measurement and machining tools has partially reflecting boundary surfaces within its measurement head with a separation shorter than the coherence length

Hauger, Christoph
•
Lasser, Theo  
•
Siegel, Augustin
Show more
2004

The invention relates to an interferometer system (41), especially for use in a co-ordinate measuring system. Said interferometer system comprises, disposed in an illumination beam path, a pair of spaced-apart boundary surfaces (52, 53). A boundary surface (53) facing an object (9) is arranged in a detection beam path, a detector (61) being additionally disposed in said detection beam path. The invention also relates to an interferometer system, especially one of the above-described type, which is provided with a speed indicating system for detecting a relative speed between the test head and the object. A frequency filter of the interferometer system is adjusted depending on the relative speed.

  • Details
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Type
patent
EPO Family ID

32519247

Author(s)
Hauger, Christoph
Lasser, Theo  
Siegel, Augustin
Höller, Frank
Knupfer, Klaus
Monz, Ludwin
Gross, Herbert
Subjects

Interformeter system

•

Measuring device

Note

Alternative title(s) : (de) Interferometersystem und messvorrichtung (fr) Systeme interferometrique et dispositif de mesure (en) Interferometer system and measuring device

EPFL units
LOB  
DOICountry codeKind codeDate issued

DE10392656

DE

B4

2012-06-14

DE10260256

DE

B9

2007-03-01

DE10392656

DE

D2

2005-12-22

DE10260256

DE

B4

2005-02-17

WO2004057266

WO

A8

2005-01-20

WO2004057266

WO

A3

2004-11-18

DE10260256

DE

A1

2004-07-15

AU2003290103

AU

A1

2004-07-14

WO2004057266

WO

A2

2004-07-08

Available on Infoscience
April 15, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/66497
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