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  4. Electrically tunable optical resonator on a chip for fast tunable integrated lasers
 
patent

Electrically tunable optical resonator on a chip for fast tunable integrated lasers

Kippenberg, Tobias  
•
Bhave, Sunil
•
Tian, Hao
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2022

The present invention relates to an electrically tunable photonic resonator device for a component having a fast and flat actuation response, comprising: - At least one optical waveguide with an optical interface for coupling in laser light, - At least one optical resonator including a waveguide being made of an optical resonator material, particularly Si3N4, wherein laser light coupled via the at least one optical waveguide is coupled into the at least one optical resonator, - At least one piezo actuator to apply mechanical stress at least partially onto the at least one optical resonator; wherein the at least one optical resonator, the at least one piezo actuator and the at least one optical waveguide are monolithically integrated on a common substrate of the photonic resonator device; - a mechanical mode suppression means configured to attenuate one or more mechanical modes of oscillation caused by an AC operation of the at least one piezo actuator.

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