patent
3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication
Cao, Ji
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Ionescu, Mihai Adrian
2013
A 3D M-CNT structure with at least one tri-state CNT NEM switch comprising at least an electrode as a source, an electrode as a gate and an electrode as a drain, a conductive carbon nanotube which is able to take three positions depending on a voltage application to said electrodes.