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  4. 3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication
 
patent

3d nano-electro-mechanical multiple-state carbon nanotube device structures and methods of fabrication

Cao, Ji
•
Ionescu, Mihai Adrian
2013

A 3D M-CNT structure with at least one tri-state CNT NEM switch comprising at least an electrode as a source, an electrode as a gate and an electrode as a drain, a conductive carbon nanotube which is able to take three positions depending on a voltage application to said electrodes.

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Type
patent
EPO Family ID

49580572

Author(s)
Cao, Ji
Ionescu, Mihai Adrian
TTO classification

TTO:6.1140

EPFL units
AVP-R-TTO  
IdentifierCountry codeKind codeDate issued

US9117889

US

B2

2015-08-25

US2013306937

US

A1

2013-11-21

Available on Infoscience
June 13, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/138285
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