A method for patterning a thin film of (a) solid material(s), comprising the steps of providing a thin film of said solid material(s) onto a substrate, said substrate being deformable by heat and indentation; and performing a thermo-mechanical indentation of said thin film of solid material(s), comprising the steps of thermally deforming the deformable substrate and patterning by indentation the thin film of solid material(s), thereby obtaining patterning features on the thin film of (a) solid material(s).