Auf zehn Nanometer genau - Positioniertisch für die Mikromontage
1995
Details
Title
Auf zehn Nanometer genau - Positioniertisch für die Mikromontage
Author(s)
Zesch, W. ; Codourey, A. ; Büchi, R. ; Siegwart, R.
Published in
Technische Rundschau, TR Transfer
Issue
29/30
Date
1995
Publisher
Bern, Hallwag
Laboratories
LSA
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LSA - Autonomous Systems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2006-12-07