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conference paper
Dynamical Modelling and Position Control of Ultrasonic Piezoelectric Positioning Stage
2006
IEEE International Ultrasonics Symposium
The paper describes development of a feedback position controller for a new type of monolithic "hybrid" ultrasonic motor. The goal of the controller design was to demonstrate the main advantage of this piezoelectric motor – high speed and high accuracy at the same time. Tracking of 1 mm steps with 30 nm error in down to 100 ms has been achieved.
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Name
Dynamical Modelling and Position Control of Ultrasonic Piezoelectric Positioning Stage.pdf
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restricted
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510.22 KB
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Adobe PDF
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42d1684a61dcdbf9b3c506018ef8eb15