Nano-gap MEMS resonators and adapted oscillator design

conference paper not in proceedings

Mazza, M.

•

Badila, D.

•

2006

Type

conference paper not in proceedings

Authors

Mazza, M.

•

Badila, D.

•

•

Ionescu, A. M.

•

Publication date

2006

Peer reviewed

REVIEWED

EPFL units

Event name	Event place	Event date
NanoTimer Workshop on Micro-Electro-Mechanical Resonators: from Technology to Applications	Lausanne, Switzerland	2006

Available on Infoscience

November 30, 2006

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