Micro manipulation tasks with micro tweezers were operated in different configurations. This paper discusses the main issues of pick and place operations with micro tweezers as geometric consideration, grasping force and quality of the contact surfaces. This study is based on positioning repeatability measurements and success rate of the tasks operated automatically on our micro manipulation setup. Results for a MEMS micro gripper show a high reliability of more than 90% of success rate and positioning repeatability under the micrometer.