Scanning near field infrared microscopy using chalcogenide fiber tips
Chalcogenide glass optical fibers were fabricated into functional apertured probes for near field scanning infrared microscopy. Probe fiber tips were chemically etched and aluminum coated for the purpose of simultaneously collecting near field shear force and optical signals. Surface topography and infrared optical reflectivity data were obtained using the tips in a scanning near field microscope while illuminating an integrated microcircuit with the output from a free electron laser operating at a lambda of 4.7 mu m Approximately 25 nm topographical and 100 nm optical lateral resolution were observed. (C) 2000 Elsevier Science B.V. All rights reserved.
USN, Res Lab, Washington, DC 20375 USA. Univ Res Fdn, Greenbelt, MD USA. CNR, Ist Struttura Mat, Rome, Italy. Ecole Polytech, Lausanne, Switzerland. Vanderbilt Univ, Nashville, TN USA. Talley, DB, USN, Res Lab, Bldg 215,4555 Overlook Ave, Washington, DC 20375 USA.
ISI Document Delivery No.: 285KE
Record created on 2006-10-03, modified on 2016-08-08