The development and application of imaging EXAFS spectromicroscopy

The capability to perform absorption spectroscopy with hard x-rays was added to the synchrotron imaging spectromicroscopy technique. We present several successful test cases. First, the EXAFS (extended x-ray absorption fine structure) analysis was implemented in areas as small as few mu m(2) for transition-metal K edge absorption spectra. The corresponding structural information was complemented by chemical information from the near-edge region. Specifically, in the case of a cross-sectional cut steel different Fe oxidation states were found at different depths. Tests on a PVD grown TiN film revealed areas with oxidized Ti. Overall, these tests demonstrate the feasibility of combining structural and chemicals analysis with hard x ray absorption and high lateral resolution.

Published in:
Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers, 38, 646-649
Acad Sinica, Inst Phys, Taipei, Taiwan. China Steel Co, Kaohsiung, Taiwan. Kwangju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju, South Korea. Kwangju Inst Sci & Technol, Ctr Elect Mat Res, Kwangju, South Korea. Pohang Univ Sci & Technol, Dept Mat Sci & Engn, Pohang, South Korea. Univ Mainz, Inst Phys, D-6500 Mainz, Germany. Sincrotrone Trieste, I-34012 Trieste, Italy. Ecole Polytech Fed Lausanne, Inst Phys Appl, CH-1015 Lausanne, Switzerland. Hwu, Y, Acad Sinica, Inst Phys, Taipei, Taiwan.
ISI Document Delivery No.: 240AT
Suppl. 1

 Record created 2006-10-03, last modified 2018-03-18

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