An electron imaging approach to soft-x-ray transmission spectromicroscopy

We tested a new soft-x-ray transmission spectromiscropy technique on the Aladdin storage ring at the Wisconsin Synchrotron Radiation Center. Transmitted x rays were converted with a photocathode into photoelectrons, which were subsequently electron-optically processed by an x-ray secondary electron-emission microscope producing submicron-resolution images. Test images demonstrated the excellent contrast due to the chemical differences between silicon features and a silicon nitride substrate. We also obtained x-ray transmission versus photon energy curves for microscopic specimen areas. (C) 1996 American Institute of Physics.


Published in:
Review of Scientific Instruments, 67, 3, 737-741
Year:
1996
Publisher:
American Institute of Physics
ISSN:
0034-6748
Keywords:
Note:
Cnr,ist struttura mat,frascati,italy. univ wisconsin,dept phys,milwaukee,wi 53211. univ wisconsin,dept mat sci & engn,madison,wi 53706. DeStasio, G, ECOLE POLYTECH FED LAUSANNE,INST PHYS APPL,PH ECUBLENS,CH-1015 LAUSANNE,SWITZERLAND. ISI Document Delivery No.: UA057 Part 1 Times Cited:8; Cited References Count:7
Laboratories:




 Record created 2006-10-03, last modified 2018-03-18


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