High-Resolution Spectromicroscopy with Maximum - Photoemission Spectroscopy Reaches the 1000-Angstrom Scale
We present new results from the soft X-ray scanning photoemission microscope: MAXIMUM. The microscope is installed at the U41 undulator at the Synchrotron Radiation Center at the University of Wisconsin. The instrument is based on a multilayer-coated Schwarzchild objective, operating at 95 eV, and it has demonstrated spatial resolution better than 0.1 mum and electron energy resolution of 300 meV. We review the design and the implementation of the microscope. We also present recent results as well as a summary of the research programs that are bei conducted with MAXIMUM.
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Lawrence berkeley lab,berkeley,ca 94720. ecole polytech fed lausanne,dept phys appl,ch-1015 lausanne,switzerland. Ng, w, univ wisconsin,ctr xray lithog,3731 schneider dr,stoughton,wi 53589.
ISI Document Delivery No.: PD429
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