Ferroelectric properties of an epitaxial lead zirconate titanate thin film deposited by a hydrothermal method below the Curie temperature
Deposition of a hydrothermal method has a number of advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure, and a large thickness. The present paper investigates the improvement of an epitaxial lead zirconate titanate (PZT) thin film deposited via hydrothermal synthesis. The critical parameter contributing to the film morphology was revealed to be the holding position of the reaction solution during deposition. In addition to this improvement, the SrRuO3 bottom electrode was confirmed to be able to withstand high alkali concentrations during the hydrothermal reaction. A hydrothermal synthesis time of 24 h yielded a PZT film with a thickness of 500 nm on SrRuO3/SrTiO3 (100) at 150 degreesC. The remanent polarization 2Pr and coercive electric field were 38.4 muC/cm(2) and 21.8 kV/cm, respectively. (C) 2004 American Institute of Physics.
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Morita, T Tohoku Univ, Elect Commun Res Inst, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan Tokyo Inst Technol, Dept Innovat & Engineered Mat, Midori Ku, Yokohama, Kanagawa 2268502, Japan Swiss Fed Inst Technol, Mat Inst, Fac Engn, Ceram Lab, CH-1015 Lausanne, Switzerland
Cited References Count:15
Record created on 2006-08-21, modified on 2016-08-08